Anthony教授系列学术讲座
学 术 报 告
系列讲座：Advanced Process Control in Semiconductor Manufacturing
报告人：Dr. Anthony J. Toprac
报告时间： 2012年5月16日上午9：30-12：00
报告地点：流程工业综合自动化国家重点实验室（建筑馆207会议室）
Abstract
Semiconductor manufacturing over the last fifteen years has been revolutionized by the widespread implementation of Advanced Process Control (APC) technology. Building on well-entrenched Statistical Process Control (SPC) systems, APC provides an automated, systematic method of detecting faulty operation (Fault Detection, Classification, and Prediction) and correcting off-target processing (Run-to-Run Control). As such, the correct implementation of APC systems has become a critical requirement for cost-effective semiconductor manufacturing.
In his presentation, Dr. Anthony Toprac will review current state-of-the-art methods of run-to-run control and fault detection in common world-wide use in semiconductor fabs, with discussion of current needs for new research and development in manufacturing controls.
Biography
With over thirty publications and seventy-seven issued patents in the field of semiconductor process modeling and control, Dr. Toprac is recognized internationally as an industry leader in the application of Advanced Process Control methods in microelectronic manufacturing. Dr. Toprac received his B.S. in engineering physics from Cornell University, and M.S. and Ph.D. in chemical engineering from the University of Texas. At Advanced Micro Devices, Dr. Toprac initiated the application of APC in AMD’s microprocessor production line. Managing this effort from concept to accepted practice, Dr. Toprac drove AMD’s APC staff to achieve some of the most advanced semiconductor run-to-run controls in use at the time. Subsequently, Dr. Toprac worked on the specification and implementation of advanced control and on-line data analysis systems for software suppliers that served the semiconductor industry.
Now in his own private practice, Dr. Toprac delivers instruction and consulting in advanced process control methods for semiconductor manufacturing cliental worldwide.
